PASHCHENKO, G.A.; KRAVETSKY, M.J.; FOMIN, O.V. Singularities of Polishing Substrates GaAs by Chemo-Dynamical and Non-Contact Chemo-Mechanical Methods. Physics and Chemistry of Solid State, [S. l.], v. 16, n. 3, p. 560–564, 2015. DOI: 10.15330/pcss.16.3.560-564. Disponível em: https://personnel.pnu.edu.ua/index.php/pcss/article/view/1653. Acesso em: 21 nov. 2024.