[1]
S. Novosiadlyi, V. Mandzyuk, N. Humeniuk, and Huk І., “Peculiarities of Forming of Microwave Arsenide-Gallium Submicron Structures of Large-scale Integrated Circuit”, Phys.Chem.Sol.State, vol. 19, no. 2, pp. 186–190, May 2019.