Ievtushenko A, Klochkov L, Lytvyn O, Tkach V, Kutsay O, Starik S, et al. The Influence of Oxygen Pressure on ZnO:Al Thin Films Properties Grown by Layer by Layer Growth Method at Magnetron Sputtering. Phys.Chem.Sol.State [Internet]. 2015 Dec. 15 [cited 2024 Nov. 16];16(4):667-74. Available from: https://personnel.pnu.edu.ua/index.php/pcss/article/view/1614