Structure and 3-D Model of a Solid State Thin-Film Magnetic Sensor

G.I. Barylo; R.L. Holyaka; T.A. Marusenkova; M.S. Ivakh

doi:10.15330/pcss.22.3.444-452

Authors

G.I. Barylo Lviv Polytechnic National University
R.L. Holyaka Lviv Polytechnic National University
T.A. Marusenkova Lviv Polytechnic National University
M.S. Ivakh Lviv Polytechnic National University

DOI:

https://doi.org/10.15330/pcss.22.3.444-452

Keywords:

3-D magnetic sensor, split Hall structures, SPICE model

Abstract

Vector 3-D magnetic sensors form the basis of measurement devices for magnetic field mapping and magnetic tracking. Typically, such sensors utilize specific constructions based on split Hall structures (SHS). An SHS-based 3-D magnetic sensor is a bulk semiconductor integrated structure with 8 or more contacts. Combining current flow directions through the contacts and measuring the corresponding voltages, one defines projections B_X, B_Y, B_Z of the magnetic field vector. This work presents a novel design of 3-D solid state magnetic sensors that requires no insulation by p-n junctions and can be implemented by thin-film technology traditionally used for fabrication of Hall sensors including those based on InSb films. Besides, a SPICE model of the 3-D magnetic sensor is provided, which helps design the proposed sensor and refine techniques of its calibration.

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