Selective Etching of ZnхCd1-хTe Single Crystals
DOI:
https://doi.org/10.15330/pcss.16.4.711-715Keywords:
chemical etching, solid solutions, selective etching, etchant, etch pitsAbstract
Selective etching is an express method to identify the defects of crystal structure of semiconductors. It reveals the dislocations density, type of conductivity, crystal’s orientation, inclusions/precipitates, twins. This article is the review of selective etching of ZnxCd1-xTe single crysrals. All informations has been generalized in the table. Qualitative and quantitative compositions of etchants and information about defect structure of
ZnxCd1-xTe after etchant treatment have been represented in the table.
References
V. K. Komar, A. S. Gerasimenko, D. P. Nalivajko, Funkcional'nye materialy dlja nauki i tehniki: Sbornik statej, Kharkiv, 167 (2001).
V. N. Tomashik, Neorgan. mater. 31(3), 313 (1995).
M. Inoue, I. Teramoto, S. Takayanagi, J. Appl. Phys. 33(8), 2578 (1962).
Y.-C. Lu, R. K. Route, D. Elwell, R. S. Feigelson, J. Vac. Sci. Technol. A. 3(1), 264 (1985).
N. N. Kolesnikov, A. A. Kolchin, D. L. Alov, J. Cryst. Growth. 174, 256 (1997).
U. Gilabert, A. B. Trigubo, N. E. Walsoe de Reca, Materials Science and Engineering 27, 11 (1994).
J. C. Clark, E. D. Jones, P. Capper, J. B. Mullin, Journal of Materials Science: Materials in Electronics 9, 397 (1998).
K. Guergouri, E. Teyar, R. Triboulet, J. Cryst. Growth. 216, 127 (2000).
R. K. Bagai, Geeta Mohan, G. L. Seth, W. N. Borle, Journal of Crystal Growth 85, 386 (1987).
I. Hahnert, M. Schenk, Journal of Crystal Growth 101, 251 (1990).
K. Nakagawa, K. Maeda, S. Takeuchi, Appl. Phys. Lett. 34(9), 574 (1979).
D. Rose, K. Durose, W. Palosz [and others], J. Phys. D.: appl. Phys. 31, 1009 (1998).
A. Hossain, A. E. Bolotnikov, G. S. Camarda [and others], Journal of Crystal Growth 310, 4493 (2008).
Yang Jianrong, Gu Huiming, Chen Xinqiang [and others], Journal of Crystal Growth 234, 337 (2002).
R. Watson, K. Durose, A. J. Banister, [and others], Materials Science and Engineering 16, 113 (1993).
B. Wermke, M. Mühlberg, A. Engel, P. Rudolph, Crystal Res. Technol. 24, 365 (1989).
A. Hossaina, A. E. Bolotnikova, G. S. Camardaa, [and others], Journal of Crystal Growth 312, 1795 (2010).
M. Muhlberg, P. Rudolph, C. Genzel [and others], Journal of Crystal Growth 101, 275 (1990).
M. A. Kovalec, N. I. Kuchma, E. S. Nikonjuk, Fiz. i him. obrab. materialov 3, 125 (1987).
A. Szczerbakow, J. Domagala, D. Rose [and others], J. Cryst. Growth 191, 673 (1998).
P. D. Brown, K. Durose, G. J. Russell, J. Woods, Journal of Crystal Growth 101, 211 (1990).
A. Iller, G. Karczewski, G. Kolmhofer, [and others], Cryst. Res. Technol. 33, 401 (1998).