Inelastic energy loss of Ar ions scattered Al2O3 surface under grazing incidence

A.S. Ashirov; M.K. Qurbanov; I.U. Tangribergenov; M.K. Karimov; K.U. Otabaeva

doi:10.15330/pcss.22.2.255-259

Authors

A.S. Ashirov Urgench State University
M.K. Qurbanov Urgench State University
I.U. Tangribergenov Urgench State University
M.K. Karimov Urgench State University
K.U. Otabaeva Urgench State University

DOI:

https://doi.org/10.15330/pcss.22.2.255-259

Keywords:

ion scattering, semichannel, computer simulation, inelastic energy loss

Abstract

In this paper presents the investigation of the surface Al₂O₃by ion scattering spectroscopy. The trajectory of small angle scattered ions calculated by the method of binary collision approximation. It was found dependence of inelastic energy loss and trajectories of scattered ions. The value of inelastic energy loss scattered ions almost depend to the angle of incidence and the geometrical parameters of surface semichannels.

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