Structure and Vibrational Spectra of thin Films β-Ga2O3
DOI:
https://doi.org/10.15330/pcss.17.4.515-519Keywords:
gallium oxide, thin films, vibrational spectraAbstract
The structure, phase composition and surface morphology of thin films b-Ga2O3, obtained by high-frequency ion-plasma sputtering, after annealing at different atmosphere was investigated. The spectra of IR reflection of system thin film b-Ga2O3 - fused quartz substrate υ-SiO2 in region 400–1600 cm-1 at 295 K were measured. The peaks in the spectrum of films b-Ga2O3, associated with vibration of Ga – O fragments in structural tetrahedral GaO4 and octahedral GaO6 complexes was interpreted.
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Published
2016-12-15
How to Cite
Bordun, O., Partyka , M., Medvid, I., Kukharskyy, I., Ptashnyk, V., & Bordun, B. (2016). Structure and Vibrational Spectra of thin Films β-Ga2O3. Physics and Chemistry of Solid State, 17(4), 515–519. https://doi.org/10.15330/pcss.17.4.515-519
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