Assessment of titanium - tungsten iron oxide and their gas sensor application

Erdal Turgut; Elvan Şenarslan; Günay Merhan Muğlu; Sevda Saritas

doi:10.15330/pcss.25.3.498-505

Authors

Erdal Turgut Atatürk University, Department of Electric Power Generation, Aşkale Vocational College, Erzurum, Turkey
Elvan Şenarslan Atatürk University, Department of Electric Power Generation, Aşkale Vocational College, Erzurum, Turkey
Günay Merhan Muğlu Atatürk University, Department of Medical Services and Techniques, Hınıs Vocational School, Erzurum, Turkey
Sevda Saritas Atatürk University, Department of Electric Power Generation, Transmission and Distribution, İspir Hamza Polat Vocational College, Erzurum, Turkey

DOI:

https://doi.org/10.15330/pcss.25.3.498-505

Keywords:

TixFe3-xO4, WxFe3-xO4, gas sensor, magnetron co-sputtering

Abstract

Ti_xFe_3-xO₄ and W_xFe_3-xO₄ structures were grown. When examining the atomic percentages of the films grown under the same conditions as the EDX measurements, different ratios are observed in the W_xFe_3-xO₄structure (O: 71.05%, Fe: 4.22%, W: 24.74%). This is the opposite in the structure of Ti_xFe_3-xO₄(O; 58.16%, Fe; 41.68%, Ti; 0.17%). It is possible to say that the power source has an effect here, but also plasma thermodynamics and activation energies of metals play a significant role. The difference in the amount of oxygen in the structures is quite evident. The band gap energy of the as-grown and annealing Ti_xFe_3-xO₄structures were determined to be 2.19 eV and 2.14 eV respectively from absorption data. As grown and annealing W_xFe_3-xO₄structures were determined to be 3.09 eV and 3.15 eV respectively. The response of W_xFe_3-xO₄structure to hydrogen gas was measured at flow values of 1000 ppm, at 300 degrees, under white light and dark for 300, 180, and 120 seconds, and it has been seen that the examined thin films are suitable for gas sensor application under white light. The W_xFe_3-xO₄structure exhibits light sensitivity, despite having a relatively wide band gap. However, there is no evidence to suggest that this sensitivity is caused by hydrogen gas; but, it can be said it is sensitive to light. Also, the response of the Ti_xFe_3-xO₄structure was measured for 600 seconds, and it has been seen that the examined thin films are not suitable for gas sensor application under white light.

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